Mobile cleanroom solution for semiconductor manufacturing

The industrial production of wafers requires sensitive, intelligent and clean automation solutions. We offer the KMR iiwa CR specifically for the safe handling of sensitive components such as wafers. The solution consists of a combination of a cleanroom cobot and a mobile platform. The robot's patented gripper is specially designed for safe handling in cleanroom environments. In addition, continuous production is ensured without interrupting battery charging. The mobile solution is based on inductive charging technology so that the platform passes over a charging station during the pick-and-place process and is then charged during the process – without any loss of time.